Supply and Commissioning of an Inductively Coupled Plasma Etcher

Concepts

• glasgow
• precision equipment
• plasma etcher
• distinct plasma etchings
• etcher
• coupled
• plasma
• inductively
• laboratory and optical equipment
• microelectronic machinery and apparatus

Location

University of Strathclyde

Geochart for 1 buyers and 0 suppliers

Strathclyde University

+−

Leaflet | Map tiles by Stamen Design, under CC BY 3.0. Data by OpenStreetMap, under ODbL.

Description

An Inductively Coupled Plasma Etcher is sought to process semiconductor materials such as (but not limited to) Gallium Nitride and Silicon. The ideal system will be deployed for academic research and located within a cleanroom micro-fabrication facility.

Total Quantity or Scope

The Institute of Photonics is seeking to complement their cleanroom micro-fabrication facility equipment with an Inductively Coupled Plasma Etcher. The system will be used to process semiconductor materials typically (but not limited to) Gallium Nitride (GaN) and Silicon (Si) passive and active devices. The system will be employed for academic research. It is purposed to bring extra capability to already existing assets. The system sought after is destined to provide the capability of chlorinated and fluorinated distinct plasma etchings. Chlorine-based etch rates for GaN should be in the order of few hundreds of nanometres per minute (c.a. 500 nm/min). Selectivity to typical masking material such as photoresist and silica (SiO2) should be guaranteed. Fluorinated-based plasma in a Deep Reactive Ion Etching mode of Silicon should be provisioned to execute the Bosch process. The system should allow the load-lock handling and processing of a single 4” wafer. Additional information: The University is publishing this PIN for initial Market Research and Engagement purposes. The University may conduct further market engagement with the suppliers that note interest in this opportunity.

CPV Codes

• 38000000 - Laboratory, optical and precision equipments (excl. glasses)
• 31712100 - Microelectronic machinery and apparatus

Other Information

** PREVIEW NOTICE, please check Find a Tender for full details. ** NOTE: To register your interest in this notice and obtain any additional information please visit the Public Contracts Scotland Web Site at https://www.publiccontractsscotland.gov.uk/Search/Search_Switch.aspx?ID=792877. (SC Ref:792877)